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IEST RP-CC028.1
- Minienvironments
- Recommended Practice by Institute of Environmental Sciences and Technology, 05/01/2002
- Publisher: IEST
$118.00$235.00
This RP provides a framework for describing minienvironments for microelectronics and similar applications. It is intended to stimulate discussion of specifications and configurations for a specified application between the supplier and customer.
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