SEMI F30

The purpose of this Test Method is to verify the performance of purifiers during start-up by employing analytical instrumentation to measure gas impurities and particles to customer specifications. If specific inlet challenge(s) and/or inlet measurements are required, it should be discussed beforehand with the customer. Inlet impurities must be measured by part-per-million (ppm) or part-per-billion (ppb) analytical equipment. This procedure applies only to large scale bulk purifiers rated at greater than 50 liters-per-minute (LPM) flow rate.

Verification of performance of large scale purifiers in nitrogen, argon, helium, oxygen, and hydrogen service. Verification tests are done at ppb or sub-ppb levels of gaseous impurities and sub-micron sizes of particles measured downstream of any installed filter modules. Tests are done at maximum achievable flow of purifier, and/or customer’s specified percentages of maximum rated flow.