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SEMI F3
- GUIDE FOR WELDING STAINLESS STEEL TUBING FOR SEMICONDUCTOR MANUFACTURING APPLICATIONS
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The purpose of this guide is to provide instructions to
increase the awareness of the user to the available procedures
for welding stainless steel gas distribution systems
and to provide information from which
subsequent evaluations and standardization can be
derived
Referenced SEMI Standards
SEMI F3-94 N/A SEMI 1990, 1996 GUIDE FOR WELDING STAINLESS STEEL TUBING FOR SEMICONDUCTOR MANUFACTURING APPLICATIONS
Revision History
SEMI F3-94 (technical revision)
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